Effect of stage control parameters on the FIB milling process
Effect of stage control parameters on the FIB milling process Joon Hyun Kima,c, JinHyo Boob,c, YounJea Kima,c,⁎ a School of Mechanical Engineering, Sungkyunkwan University, Suwon 440746, South Korea b Department of Chemistry, Sungkyunkwan University, Suwon 440746, South Korea c Center for Advanced Plasma Science and Technology, Sungkyunkwan University, Suwon 440746, South Korea